Tungsten Hexafluoride

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Tungsten Hexafluoride (WF6)

Tungsten Hexafluoride Supplier

Tungsten Hexafluoride (WF₆) is a colorless to pale yellow, highly volatile, corrosive inorganic gas (molecular weight: 297.83). It exists as a liquid at room temperature and is vaporized for use. Its gas density at 20°C is approximately 13.0 g/L (approximately 10 times that of air). It is highly reactive and rapidly hydrolyzes upon contact with water or moisture to form hydrogen fluoride and tungsten trioxide. As the standard precursor for tungsten deposition in semiconductor CVD processes, tungsten hexafluoride is an indispensable specialty gas in modern chip manufacturing.

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Specifications

CAS No.	7783-82-6
UN No.	2196
EINECS No.	232-091-1
Molecular Weight	297.83
Appearance	Colorless
Melting Point	2.3 °C
Boiling Point	17.1 °C
Density	13.0 g/L
DOT Class	2.3
Label	Toxic Gas

	Electronic Grade Tungsten Hexafluoride
Specification	99.9995%
O2+Ar	≤ 0.5 ppmv
N2	≤ 0.5 ppmv
CO	≤ 0.5 ppmv
CO2	≤ 0.5 ppmv
CF4	≤ 0.5 ppmv
SF6	≤ 0.5 ppmv
SiF4	≤ 0.5 ppmv
HF	≤ 1.0 ppmv

Packaging Specifications

Gas Container >>

Cylinder Specifications		Content
Cylinder Capacity	Valve	Weight
40L	DISS638	70 kg

Key Applications

Semiconductor Electronics

The semiconductor and electronics manufacturing industries have extremely high requirements for gas purity and stability. YIGAS provides nitrogen (N₂), argon (Ar), ammonia (NH₃), carbon tetrafluoride (CF₄), and nitrogen trifluoride (NF₃) to meet the needs of applications throughout the entire process from wafer fabrication to display panels.

FAQ

Q1. What is tungsten hexafluoride (WF₆)?

Tungsten hexafluoride (WF₆) is a colorless, highly corrosive, and toxic inorganic gas with a molecular weight of 297.83. It is nonflammable and serves as the industry-standard precursor for tungsten deposition in semiconductor manufacturing via chemical vapor deposition (CVD).
Q2. What is tungsten hexafluoride used for?

WF₆ is primarily used in the semiconductor industry for depositing tungsten thin films through CVD processes. These tungsten films serve as low-resistivity metallic interconnects, contact holes, and via fillings in integrated circuits, logic chips, and memory devices such as 3D NAND and DRAM.
Q3. What purity grades are available for electronic-grade WF₆?

High-purity electronic grades ranging from 5N (99.999%) to 6N (99.9999%) are commercially available. Key gas-phase impurities (O₂, N₂, CO, CO₂, CF₄, SF₆, SiF₄) are each controlled to ≤0.5 ppmv for advanced node semiconductor requirements.
Q4. How is WF₆ packed and shipped?

WF₆ is supplied in DOT/ADR-compliant high-pressure steel cylinders with dedicated diaphragm valves (e.g., DISS 638). Common sizes include 40L cylinders, with additional packaging options such as 10L, 20L, and cylinder bundles available.
Q5. What are the key physical properties of WF₆?

CAS No. 7783-82-6, UN No. 2196, molecular weight 297.83 g/mol, appearance colorless gas, melting point 2.3°C, boiling point 17.1°C, gas density 13.0 g/L (approximately 11 times heavier than air).
Q6. How should WF₆ be stored and handled safely?

WF₆ is highly toxic and corrosive. It must be stored in well-ventilated areas, away from moisture and incompatible materials. Personal protective equipment (PPE), including self-contained breathing apparatus (SCBA), goggles, and chemical-resistant gloves, is required. Cylinders should not be exposed to temperatures above 52°C.
Q7. What happens if WF₆ reacts with water?

WF₆ reacts violently with water or moisture, hydrolyzing rapidly to form hydrogen fluoride (HF) and tungsten oxides. This reaction produces corrosive and toxic fumes, requiring strict isolation from humidity during handling and storage.

Why Choose YIGAS?

Team

Global Leadership: Management team with multinational and listed company backgrounds, backed by decades of expertise in the industrial gases sector.

End-to-End Expertise: Integrated capabilities spanning production, operation, R&D, commercialization, and quality assurance in gas industry.

Technical Excellence: Advanced knowledge in gas/chemical synthesis, purification, and process optimization, supported by on-demand technical application services.

R & D

Innovation-Driven: Focus on cutting-edge R&D to deliver safer, sustainable, and cost-effective gas solutions.

Full-Cycle Development: From concept design to scalable production, ensuring seamless technology transfer and market readiness.

Service

Customer-Centric Solutions: Tailored services with flexibility, professionalism, and 24/7 dedicated support.

Value Proposition: Guaranteed supply chain stability, safety compliance (ISO/OSHA standards), and total cost optimization.

Quality

Zero-Compromise Standards: Rigorous QC protocols for both in-house and outsourced products, validated by third-party certifications.

Operational Precision: Expertise in lean production management, analytical quality control, and continuous process improvement.

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