+86 139 2320 4047

Inquire Now

Popular Gases

Home > Gases Supply > Popular Gases > Tungsten Hexafluoride

Tungsten Hexafluoride (WF6)

Tungsten Hexafluoride Supplier

Tungsten Hexafluoride (WF₆), a type of specialty gase,is a colorless to pale yellow, highly volatile, corrosive inorganic gas (molecular weight: 297.83). It exists as a liquid at room temperature and is vaporized for use. Its gas density at 20°C is approximately 13.0 g/L (approximately 10 times that of air). It is highly reactive and rapidly hydrolyzes upon contact with water or moisture to form hydrogen fluoride and tungsten trioxide. As the standard precursor for tungsten deposition in semiconductor CVD processes, tungsten hexafluoride is an indispensable specialty gas in modern chip manufacturing.

Inquire Now >> Next Products >>

Tungsten Hexafluoride(WF6) Specifications

YIGAS is a tungsten hexafluoride supplier providing 99.9995% electronic-grade WF6 for semiconductor chemical vapor deposition processes. Our tungsten hexafluoride is designed for tungsten thin-film deposition in logic devices, DRAM, NAND, 3D NAND, integrated circuits and other semiconductor manufacturing applications.

For semiconductor manufacturers, electronic gas distributors and material supply companies, sourcing WF6 involves more than confirming the headline purity. Buyers also need to evaluate individual impurity limits, batch consistency, cylinder preparation, valve compatibility, quality documentation and long-term supply stability.

YIGAS supports qualification requirements, multi-cylinder orders and scheduled supply programs. Technical specifications, batch documentation, packaging details and destination requirements can be reviewed before quotation and supplier approval.

CAS No.	7783-82-6
UN No.	2196
EINECS No.	232-091-1
Molecular Weight	297.83
Appearance	Colorless
Melting Point	2.3 °C
Boiling Point	17.1 °C
Density	13.0 g/L
DOT Class	2.3
Label	Toxic Gas

	Electronic Grade Tungsten Hexafluoride
Specification	99.9995%
O2+Ar	≤ 0.5 ppmv
N2	≤ 0.5 ppmv
CO	≤ 0.5 ppmv
CO2	≤ 0.5 ppmv
CF4	≤ 0.5 ppmv
SF6	≤ 0.5 ppmv
SiF4	≤ 0.5 ppmv
HF	≤ 1.0 ppmv

Tungsten Hexafluoride Packaging Specifications

Gas Container >>

Packaging Item	Standard Configuration
Cylinder Water Capacity	40L
Valve Connection	DISS 638
WF6 Net Filling Weight	70 kg
Supply Form	Liquefied gas under vapor pressure
Cylinder Use	Dedicated packaging for corrosive and toxic gas service
Documentation	Cylinder and valve information available upon request
Shipment Format	Individual cylinders or coordinated multi-cylinder shipments

The 40L WF6 cylinder configuration is suitable for semiconductor production programs that require standardized gas cabinet and valve connections. Before placing an order, the customer should confirm that the cylinder, valve connection and gas delivery equipment are compatible with the receiving facility.

Special packaging, labeling, palletization or traceability requirements can be evaluated according to order quantity, destination regulations and customer site procedures.

Safe Storage and Handling of Tungsten Hexafluoride

WF6 is toxic, corrosive and highly reactive with moisture. It should only be handled by trained personnel using approved equipment and facility procedures.

General handling considerations include:

Store cylinders in a secure and well-ventilated area.
Protect cylinders from water, humidity and incompatible materials.
Keep valve protection devices in place when cylinders are not connected.
Use gas cabinets and delivery systems designed for toxic and corrosive gases.
Confirm that valves, regulators, piping and seals are compatible with WF6.
Use appropriate gas detection, ventilation and emergency treatment systems.
Do not heat cylinders outside approved operating procedures.
Inspect connections and equipment before introducing the gas.
Follow the current SDS and site-specific operating procedures.
Prepare emergency procedures for leaks, exposure and moisture contact.

This information is a general procurement overview and does not replace the current Safety Data Sheet, equipment-manufacturer instructions or local safety regulations.

Our Advantages

Team

Global Industry Background: Core team consists of former executives and technical experts from international gas giants, leading electronic materials companies, and major semiconductor fabs, with over 15 years of industry experience.

Full Industry Chain Capability: Covering the entire process of high-purity electronic specialty gas synthesis, purification, operation, quality control, and technical services.

Technical Leadership: Expertise in silicon-based gases, metal precursors, and novel etching gas R&D and process adaptation innovation.

R&D

World-Leading Technology Platform: WF6 adopts the AHF-F2 preparation process with non-powered filling, avoiding contamination, achieving better quality and lower cost.

Advanced Product Development Capability: Capable of developing semiconductor-grade MCS, DCS, silicon-based precursors (e.g., BDEAS, BTBAS), and metal precursors (e.g., WCl5, MoO2Cl2).

Global Technical Collaboration: Joint development of High-K precursors and novel etching gases (e.g., PF3, C4F6) with expert teams from Europe, America, Japan, and Korea.

Service

Full Lifecycle Technical Support: Pre-sales technical consultation, on-site application support, safety assessment, after-sales quality tracking, and customized training.

Smart Logistics System: Multi-modal transport network, GPS + sensor real-time tracking, emergency dispatch mechanism, and compliant container management.

Customer Success Cases: Serving world-leading semiconductor customers including Samsung, Hynix, Micron, Intel, TSMC, and YMTC.

Quality

Top-Tier Customer Certification: WF6 products are widely adopted by global premier semiconductor fabs with stable quality and reliable supply chain.

Rigorous Quality Control Standards: Class-10 cleanroom filling, advanced analytical equipment, seamless stainless steel pneumatic valves, and drying room system ensuring filling stability.

Fully Traceable Process: From raw material to delivery, "every truckload tested" and full-chain electronic traceability system.

Why Choose YIGAS as Your Tungsten Hexafluoride Supplier?

Electronic Specialty Gas Experience

YIGAS has experience covering electronic specialty gas production, purification, quality control, filling and technical support. The team includes professionals with backgrounds in international gas companies, electronic materials and semiconductor manufacturing.

Integrated WF6 Capability

The company’s capabilities cover high-purity tungsten hexafluoride preparation, purification, filling, testing, packaging and supply coordination. This integrated structure supports communication between production, quality and commercial teams.

Controlled WF6 Production Process

The AHF-F2 production route and non-powered filling method are designed to reduce contamination risks and support stable electronic-grade product quality.

Cleanroom Filling

Class-10 cleanroom filling, controlled drying conditions and dedicated valve systems help protect WF6 against particles, moisture and handling-related contamination.

Impurity Control

The standard 99.9995% specification includes individual limits for O2 + Ar, N2, CO, CO2, CF4, SF6, SiF4 and HF, allowing semiconductor buyers to review the impurity profile rather than relying only on total purity.

Batch Traceability

Electronic production and delivery records support batch tracking, cylinder management and quality follow-up.

Qualification Support

YIGAS can coordinate specification review, documentation exchange, packaging confirmation, qualification requirements and commercial supply planning with customers.

Volume Supply Planning

Multi-cylinder shipments and recurring supply arrangements can be discussed for semiconductor manufacturers, regional electronic gas distributors and material supply companies.

Technical and After-Sales Service

Support can cover pre-sales technical communication, packaging review, transportation coordination, safety information and after-sales quality follow-up.

Request an Electronic Grade WF6 Supply Proposal

Source 99.9995% electronic-grade tungsten hexafluoride from a supplier that understands semiconductor specifications, impurity control, cylinder compatibility, quality documentation and recurring supply requirements.

Send us the following information:

Required WF6 specification
Estimated cylinder quantity
Annual consumption
Delivery destination
Required delivery date
Qualification or commercial-order status
Required COA, SDS and supplier documents

YIGAS will review the technical, packaging and logistics requirements and provide a suitable tungsten hexafluoride supply proposal.

Request WF6 Specification and COA

Get a Volume Supply Quotation

Discuss Your Semiconductor Gas Qualification Requirements

Key Applications

Semiconductor Electronics

The semiconductor and electronics manufacturing industries have extremely high requirements for gas purity and stability. YIGAS provides nitrogen (N₂), argon (Ar), ammonia (NH₃), carbon tetrafluoride (CF₄), and nitrogen trifluoride (NF₃) to meet the needs of applications throughout the entire process from wafer fabrication to display panels.

FAQ

Q1. What is tungsten hexafluoride (WF₆)?

Tungsten hexafluoride (WF₆) is a colorless, highly corrosive, and toxic inorganic gas with a molecular weight of 297.83. It is nonflammable and serves as the industry-standard precursor for tungsten deposition in semiconductor manufacturing via chemical vapor deposition (CVD).
Q2. What is tungsten hexafluoride used for?

WF₆ is primarily used in the semiconductor industry for depositing tungsten thin films through CVD processes. These tungsten films serve as low-resistivity metallic interconnects, contact holes, and via fillings in integrated circuits, logic chips, and memory devices such as 3D NAND and DRAM.
Q3. What purity grades are available for electronic-grade WF₆?

High-purity electronic grades ranging from 5N (99.999%) to 6N (99.9999%) are commercially available. Key gas-phase impurities (O₂, N₂, CO, CO₂, CF₄, SF₆, SiF₄) are each controlled to ≤0.5 ppmv for advanced node semiconductor requirements.
Q4. How is WF₆ packed and shipped?

WF₆ is supplied in DOT/ADR-compliant high-pressure steel cylinders with dedicated diaphragm valves (e.g., DISS 638). Common sizes include 40L cylinders, with additional packaging options such as 10L, 20L, and cylinder bundles available.
Q5. What are the key physical properties of WF₆?

CAS No. 7783-82-6, UN No. 2196, molecular weight 297.83 g/mol, appearance colorless gas, melting point 2.3°C, boiling point 17.1°C, gas density 13.0 g/L (approximately 11 times heavier than air).
Q6. How should WF₆ be stored and handled safely?

WF₆ is highly toxic and corrosive. It must be stored in well-ventilated areas, away from moisture and incompatible materials. Personal protective equipment (PPE), including self-contained breathing apparatus (SCBA), goggles, and chemical-resistant gloves, is required. Cylinders should not be exposed to temperatures above 52°C.
Q7. What happens if WF₆ reacts with water?

WF₆ reacts violently with water or moisture, hydrolyzing rapidly to form hydrogen fluoride (HF) and tungsten oxides. This reaction produces corrosive and toxic fumes, requiring strict isolation from humidity during handling and storage.

Why Choose YIGAS?

Team

Global Leadership: Management team with multinational and listed company backgrounds, backed by decades of expertise in the industrial gases sector.

End-to-End Expertise: Integrated capabilities spanning production, operation, R&D, commercialization, and quality assurance in gas industry.

Technical Excellence: Advanced knowledge in gas/chemical synthesis, purification, and process optimization, supported by on-demand technical application services.

R & D

Innovation-Driven: Focus on cutting-edge R&D to deliver safer, sustainable, and cost-effective gas solutions.

Full-Cycle Development: From concept design to scalable production, ensuring seamless technology transfer and market readiness.

Service

Customer-Centric Solutions: Tailored services with flexibility, professionalism, and 24/7 dedicated support.

Value Proposition: Guaranteed supply chain stability, safety compliance (ISO/OSHA standards), and total cost optimization.

Quality

Zero-Compromise Standards: Rigorous QC protocols for both in-house and outsourced products, validated by third-party certifications.

Operational Precision: Expertise in lean production management, analytical quality control, and continuous process improvement.

Industrial & Specialty Gases

Helium

Stable Supply Chain: Our helium sources originate from Qatar and the United States, ensuring reliable supply.

Helium as Core Business: With significant investments, our Zhongshan-based factory spans 13,000 m² and boasts an annual liquid helium production capacity of 300 tons.

China’s Most Advanced Facilities:

Equipped with the nation's most advanced liquid helium and helium filling production lines.

Certified under the ISO 9001:2008 Quality Management System.

Utilizes internationally recognized "filling island-style" production lines.

Gaseous helium from a reliable gases supply is ideal for semiconductor lithography, fiber-drawing, leak detection, carrier gas in GC, and balloon inflation. Liquid helium, sourced from a dedicated gases supply chain, is dedicated to MRI magnet cryo-cooling, superconducting magnet maintenance, and low-temperature physics research.

Ethylene

Ethylene, a colorless, slightly sweet-smelling hydrocarbon (C₂H₄), is the backbone of modern petrochemical industries. As the simplest alkene with a reactive carbon-carbon double bond, it exhibits high flammability (explosive range: 2.7–36% in air) and serves as a critical building block for synthetic chemistry. Used as feedstock for LLDPE/HDPE, epoxy ethane and ethanol production. Compatible with swing-reactor and high-pressure tubular processes. Our ethylene is supplied in high-purity grades (≥99.9% polymer-grade, ≥99.5% chemical-grade) via ISO-certified cylinders, backed by a reliable gases supply network to ensure consistent delivery to your operations.

Propane

Propane, a colorless, odorless, and highly flammable alkane (C₃H₈), is a cornerstone of liquefied petroleum gas (LPG) with a boiling point of -42°C, enabling efficient storage and transport as a liquid under moderate pressure. Propane is renowned for its high calorific value (50.33 MJ/kg) and clean combustion properties, making it an ideal choice for high-temperature brazing, metal cutting, forklift fuel, and LPG blending. Supplied in ISO-certified cylinders or bulk tanks through our dependable gases supply network.

Sulfur Dioxide

Sulfur dioxide (SO₂), a colorless gas with a pungent odor and high water solubility, is a versatile inorganic compound widely used in chemical manufacturing, pulp and paper processing, and as a food desiccant and preservative. It is also commonly used in sulfuric acid production and in the desulfurization of natural gas and oil. With a boiling point of -10°C, it serves as both a reactive intermediate and a functional additive, though its environmental impact as a primary air pollutant requires stringent handling. Our SO₂ is supplied in ISO-certified cylinders.

Ethylene Oxide

Ethylene oxide (C₂H₄O), a colorless, flammable gas with a faintly sweet odor, is a highly reactive epoxide critical to modern industrial and medical applications. It is primarily used for the cryogenic sterilization of disposable syringes, endoscopes, and pacemakers. With a boiling point of 10.4°C, it transitions to a liquid below this temperature, exhibiting excellent miscibility with water, ethanol, and ether. Its explosive range (3–100% in air) and carcinogenicity (Class 1B per IARC) necessitate stringent handling under NFPA 704 protocols (Health 4, Flammability 3). Supplied in ISO-certified cylinders or nitrogen-diluted blends.

Methane

Methane (CH₄), a type of Industrial Gas, is a colorless, odorless, and non-toxic organic compound with distinct physical characteristics. Under standard temperature and pressure (STP), methane exists as a gas with a density approximately 0.55 times that of air, making it lighter and minimally soluble in water. It transitions to liquid at -161.5°C (boiling point) and solidifies at -182.5°C (melting point), remaining gaseous under ambient conditions. Methane is commonly used as a fuel for heating, cooking, and power generation. Because it is an odorless hydrocarbon gas, it is often mixed with substances that have an odor to report leaks or spills in pipes and systems.

We Look Forward To Working With You.