Specialty Gases

Tetrafluoromethane

Tetrafluoromethane (CF₄)

High-Performance Etching Gas for Advanced Manufacturing

Tetrafluoromethane (CF₄), a colorless, non-flammable gas with exceptional thermal stability, serves as a critical halocarbon in precision industries. With a boiling point of -128°C and low global warming potential (GWP 7,390), it combines chemical inertness with high plasma selectivity, making it ideal for mission-critical processes. Tetrafluoromethane is used in electrical insulation, aluminum production, semiconductor etching, trace gas detection, and cosmic ray detection. Our CF₄ is supplied in ISO-certified cylinders at ≥99.999% purity (Grade 5.0).

Specifications

CAS No. 75-73-0
UN No. 1982
EINECS No. 200-896-5
Molecular Weight 88
Appearance Colorless, odorless
Melting Point -184 °C
Boiling Point -128.1 °C
Density 3.72 kg/m³
DOT Class 2.2
Label Non-flammable Gas



Electronic Grade Tetrafluoromethane 
Specification99.999%
O2+Ar≤ 1 ppm
N2≤ 2 ppm
H2≤ 0.3 ppm
CO≤ 0.3 ppm
CO2≤ 0.3 ppm
SF6≤ 0.3 ppm
THC≤ 0.3 ppm
CHF3≤ 0.3 ppm
OFC≤ 1 ppm
H2O≤ 1 ppm
HF≤ 0.1 ppm


Packaging Specifications

Gas Container >>
Cylinder SpecificationsContent
Cylinder CapacityValveGas Net Weight
47LCGA58030 kg


Key Applications

Semiconductor Electronics

The semiconductor and electronics manufacturing industries have extremely high requirements for gas purity and stability. YIGAS provides nitrogen (N₂), argon (Ar), ammonia (NH₃), carbon tetrafluoride (CF₄), and nitrogen trifluoride (NF₃) to meet the needs of applications throughout the entire process from wafer fabrication to display panels.

Safety & Compliance

NFPA 704 Rating: Health 1 / Flammability 0 / Reactivity 0

Storage: Dedicated ventilated facilities <30°C, segregated from oxidizers.

Emergency protocols: On-site gas detection and neutralization scrubbers.

FAQ

Why Choose YIGAS?

Team

Global Leadership: Management team with multinational and listed company backgrounds, backed by decades of expertise in the industrial gases sector.

End-to-End Expertise: Integrated capabilities spanning production, operation, R&D, commercialization, and quality assurance in gas industry.

Technical Excellence: Advanced knowledge in gas/chemical synthesis, purification, and process optimization, supported by on-demand technical application services.

R & D

Innovation-Driven: Focus on cutting-edge R&D to deliver safer, sustainable, and cost-effective gas solutions.

Full-Cycle Development: From concept design to scalable production, ensuring seamless technology transfer and market readiness.

Service

Customer-Centric Solutions: Tailored services with flexibility, professionalism, and 24/7 dedicated support.

Value Proposition: Guaranteed supply chain stability, safety compliance (ISO/OSHA standards), and total cost optimization.

Quality

Zero-Compromise Standards: Rigorous QC protocols for both in-house and outsourced products, validated by third-party certifications.

Operational Precision: Expertise in lean production management, analytical quality control, and continuous process improvement.

We Look Forward To Working With You.