| Cylinder Specifications | Content |
| Cylinder Capacity | Valve | Gas Net Weight |
| 47L | CGA580 | 30 kg |
CF₄ Gas for Semiconductor Plasma Etching
The primary commercial application of electronic-grade tetrafluoromethane is semiconductor plasma etching.
When CF₄ is activated in plasma, fluorine-containing reactive species are generated and can be used to etch selected silicon-containing materials.
Typical applications include:
Silicon etching
Silicon dioxide etching
Silicon nitride processing
Dielectric material etching
Wafer fabrication
Plasma surface processing
Semiconductor process development
Selected chamber-cleaning processes
CF₄ may be used alone or together with other gases depending on the required etch rate, profile and selectivity.
For semiconductor manufacturers, the key purchasing factors are:
YIGAS's broader semiconductor electronics gas solutions also include nitrogen, argon, ammonia and nitrogen trifluoride for different stages of electronic manufacturing.
Why CF₄ Purity Matters in Semiconductor Processes
For semiconductor buyers, 99.999% purity alone is not enough to qualify a CF₄ supplier.
Two products labeled 5N CF₄ may have different impurity profiles.
Moisture
Moisture can affect gas system cleanliness and process stability. YIGAS limits H₂O to ≤1 ppm in the published electronic-grade specification.
Hydrogen Fluoride
HF is a corrosive fluorine-containing impurity. The standard YIGAS specification limits HF to ≤0.1 ppm.
Oxygen and Nitrogen
Oxygen, argon and nitrogen may enter through raw materials, filling equipment or cylinder preparation. Their levels should remain consistent between production batches.
Other Fluorocarbons
CHF₃, SF₆ and other fluorinated compounds may affect plasma chemistry in sensitive processes.
This is why semiconductor procurement teams should review both the total purity and the complete COA.
For a deeper supplier qualification checklist, see our guide on how to select a high-purity CF₄ gas supplier for semiconductor manufacturing.
CF₄ Cylinder and Packaging
YIGAS provides electronic-grade CF₄ in a standard commercial cylinder configuration.
| Packaging Item | Specification |
|---|
| Cylinder Capacity | 47L |
| Valve Connection | CGA580 |
| CF₄ Net Weight | Approximately 30 kg |
| Product Form | Compressed / liquefied gas in cylinder |
| Standard Supply | Individual or multi-cylinder shipment |
Before ordering, customers should confirm:
Cylinder capacity
Required valve connection
Gas cabinet compatibility
Regulator connection
Quantity per shipment
Customer labeling
Cylinder return arrangement
Destination-country cylinder standard
Customers requiring alternative packaging or labeling can submit their requirements through our custom gas supply services.
CF₄ Supply for Semiconductor Manufacturers
Semiconductor fabs generally require more than a one-time cylinder purchase.
After a gas is qualified for a production process, buyers need consistent specifications and reliable repeat deliveries.
YIGAS can support:
Qualification Orders
Customers can review the product specification, packaging and available quality documents before introducing the gas into the qualification process.
Commercial Multi-Cylinder Supply
Once the product is approved, multiple cylinders can be coordinated according to production demand.
Scheduled Deliveries
For recurring CF₄ consumption, monthly or quarterly shipment schedules can be discussed.
Annual Supply Planning
Customers with predictable demand can provide an annual forecast to help coordinate cylinder availability, filling and international logistics.
Distributor Supply
Electronic specialty gas distributors can discuss recurring purchases, destination-specific packaging and long-term supply arrangements.
For commercial inquiries, providing monthly and annual consumption is more useful than requesting only a one-cylinder price.
CF₄ for Chamber Cleaning
CF₄ can also be used in selected plasma chamber-cleaning applications.
Reactive fluorine species produced in plasma can remove certain silicon-containing residues from process equipment.
However, CF₄ and nitrogen trifluoride are not interchangeable in every cleaning process.
The appropriate gas depends on:
For customers deciding between these two gases, our technical article on NF₃ gas vs CF₄ gas for semiconductor chamber cleaning provides a more detailed comparison.
The product page should remain focused on CF₄ specifications and supply rather than reproducing the full process comparison here.
CF₄ vs Other Semiconductor Etching Gases
CF₄ is one of several fluorocarbon gases used in plasma processing.
Other gases may provide different levels of fluorine activity, polymer formation and profile control.
For example, C₄F₈ is often considered where stronger sidewall passivation or different etch-profile control is required.
The correct gas cannot be selected only by cylinder price.
Process engineers normally consider:
Customers comparing fluorocarbon gases can read our detailed guide on CF₄ vs C₄F₈ for plasma etching.
SEMI C3.40 and Customer Specifications
SEMI C3.40 provides a specification for carbon tetrafluoride used in semiconductor manufacturing.
The SEMI standard covers 99.997% quality CF₄.
YIGAS currently publishes a higher nominal purity of 99.999%, but a higher total purity does not automatically confirm compliance with every parameter or test method required by SEMI C3.40.
If your purchasing specification requires:
SEMI C3.40
Customer-specific impurity limits
Specific analytical methods
Specific reporting limits
Additional contaminants
Batch-specific documentation
please submit the complete requirement before order confirmation.
YIGAS will compare the requested specification with the available product and confirm what can be supplied.
Quality Control for Electronic-Grade CF₄
Stable CF₄ quality depends on more than purification.
Cylinder preparation, filling, testing and transportation all influence the gas received at the customer site.
YIGAS focuses on:
Raw gas quality control
Purification
Cylinder preparation
Moisture control
Controlled filling
Impurity testing
Cylinder identification
Batch traceability
Shipment records
Quality follow-up
Available customer documents may include:
Product specification
Safety Data Sheet
Certificate of Analysis
Cylinder specification
Valve information
Batch identification
Export documentation
Customers requiring a batch-specific COA or additional test parameters should include these requirements in the RFQ.
Batch Consistency for Qualified Semiconductor Processes
Once a CF₄ source has been qualified, unexpected changes can create additional testing or requalification work.
Commercial semiconductor buyers should therefore pay attention to:
Stable impurity limits
Consistent cylinder preparation
Stable valve configuration
Product batch identification
Filling location
Analytical consistency
Product change notification
Supply continuity
YIGAS can review recurring quality and documentation requirements before long-term supply begins.
Our article on CF₄ gas supply instability and cylinder contamination risks discusses these issues in greater technical detail.
Supply Support for High-Volume CF₄ Buyers
YIGAS supports semiconductor manufacturers and specialty gas distributors with recurring CF₄ requirements.
| Purchasing Requirement | Supply Support |
|---|
| Product Qualification | Specification and packaging review |
| Trial Supply | Qualification cylinder requirements |
| Commercial Supply | Multi-cylinder shipments |
| Regular Consumption | Monthly or quarterly scheduling |
| Annual Demand | Forecast-based supply planning |
| Distributor Orders | Commercial volume and packaging review |
| Custom Specification | Impurity requirement evaluation |
| International Orders | Dangerous-goods logistics coordination |
For large-volume buyers, please provide:
Cylinders required per shipment
Monthly CF₄ consumption
Estimated annual demand
Required delivery frequency
Destination country
Required safety stock
Empty-cylinder return requirements
This helps us evaluate a realistic supply plan rather than quoting an isolated cylinder.
International CF₄ Supply
Electronic specialty gas customers often require international shipment from the production site to semiconductor fabs or regional gas distribution centers.
YIGAS can evaluate:
International availability depends on the destination, carrier acceptance and applicable regulations.
Providing the destination information at the RFQ stage allows transportation requirements to be reviewed before the order is confirmed.
Safety and Environmental Considerations
CF₄ is nonflammable and chemically stable under normal conditions, but it can displace oxygen in enclosed spaces.
Gas cylinders should be stored in a ventilated area and used with compatible regulators, valves and gas delivery systems.
During plasma processing, fluorine-containing decomposition products may be generated. Semiconductor facilities should therefore use appropriate exhaust and abatement systems based on their process conditions.
CF₄ is also a long-lived fluorinated greenhouse gas. Users should control leaks, optimize process consumption and manage exhaust emissions according to applicable regulations and facility environmental programs.
This core product page does not need to carry a long environmental discussion. Detailed process and environmental assessments should be handled by the customer's engineering and EHS teams.
Why Choose YIGAS as Your CF₄ Gas Supplier?
99.999% Electronic-Grade CF₄
YIGAS supplies 5N tetrafluoromethane designed for semiconductor and electronic manufacturing applications.
Defined Impurity Specification
Published limits cover O₂ + Ar, N₂, H₂, CO, CO₂, SF₆, hydrocarbons, CHF₃, other fluorocarbons, moisture and HF.
Commercial Cylinder Supply
The standard configuration is a 47L cylinder with a CGA580 valve and approximately 30 kg CF₄ net content.
Semiconductor Gas Portfolio
In addition to CF₄, YIGAS supplies electronic specialty gases including ammonia and NF₃, as well as nitrogen and argon for semiconductor manufacturing.
Quality and Traceability Support
Product, batch, cylinder and shipment records can be managed according to agreed customer requirements.
Recurring Supply Support
Qualification orders can transition into scheduled multi-cylinder or long-term commercial supply.
International Logistics
YIGAS can coordinate cylinder packaging, dangerous-goods documentation and international shipping requirements.
Technical Specification Review
Customers can submit fab specifications or individual impurity limits before quotation to reduce specification mismatches during qualification.
Request a CF₄ Gas Quotation
Looking for a reliable tetrafluoromethane gas supplier for semiconductor plasma etching or electronic manufacturing?
Send YIGAS:
Required CF₄ purity
Target impurity limits
Process application
Cylinder quantity
Estimated monthly or annual consumption
Valve and packaging requirements
Destination country and port
Required quality documents
Delivery schedule
Our team will review the technical, packaging and commercial requirements and provide a suitable electronic-grade CF₄ supply proposal.
Request 99.999% CF₄ Specification & COA
Get a Multi-Cylinder CF₄ Quotation
Discuss Long-Term Semiconductor Gas Supply
