Specialty Gases

Nitrogen Trifluoride

Nitrogen Trifluoride (NF₃)

Precision Etching Gas for Advanced Electronics Manufacturing

Nitrogen trifluoride (NF₃) is a stable, non-flammable specialty gas engineered for high-performance plasma processes in critical electronics production. NF₃ is used as a chamber cleaning gas in the manufacture of semiconductors, flat panel displays and other electronic devices. As a low-residue fluorine source, it enables ultra-clean manufacturing with reduced environmental impact compared to legacy gases.

Specifications

CAS No.7783-54-2
UN No.2451
EINECS No.232-007-1
Molecular weight71.0019
Appearance Colourless, odourless
Melting point-206.79℃
Boiling point -129.0℃
Density2.96kg/m3
DOT Class2.2 & 5.1
LabelNon-flammable Gas, Oxidizing Agent



Industrial Grade NF3Industrial Grade NF3
Specification99.99%99.996%
CF4≤40 ppm≤20 ppm
N2≤10 ppm≤5 ppm
O2+AR≤5 ppm≤3 ppm
CO≤1 ppm≤1 ppm
CO2≤3 ppm≤0.5 ppm
N2O≤3 ppm≤1 ppm
SF6≤3 ppm≤2 ppm
H2O≤1 ppm≤1 ppm
Express as HF≤1 ppm≤1 ppm


Packaging Specifications

Gas Container >>
Cylinder SpecificationsContent
Cylinder CapacityValveGas Net Weight
47LCGA64022kg
43L DOT CylindeCGA64020kg


Key Applications

Electronics

The electronics industry requires ultra-high purity gases and specialty gases for use in semiconductors, flat panel displays, and photovoltaics. YIGAS provides nitrogen, argon, helium, sulfur hexafluoride, and nitrogen trifluoride to meet customers' stringent requirements in cleaning, etching, atmosphere protection, and testing.

Safety & Logistics

Decomposition Hazard: Forms HF above 250°C (OSHA PEL: 10 ppm TWA).

Available in cylinder, dewar

Traceable SDS and DOT/IMDG-certified transport solutions.

FAQ

Why Choose YIGAS?

Team

Global Leadership: Management team with multinational and listed company backgrounds, backed by decades of expertise in the industrial gases sector.

End-to-End Expertise: Integrated capabilities spanning production, operation, R&D, commercialization, and quality assurance in gas industry.

Technical Excellence: Advanced knowledge in gas/chemical synthesis, purification, and process optimization, supported by on-demand technical application services.

R & D

Innovation-Driven: Focus on cutting-edge R&D to deliver safer, sustainable, and cost-effective gas solutions.

Full-Cycle Development: From concept design to scalable production, ensuring seamless technology transfer and market readiness.

Service

Customer-Centric Solutions: Tailored services with flexibility, professionalism, and 24/7 dedicated support.

Value Proposition: Guaranteed supply chain stability, safety compliance (ISO/OSHA standards), and total cost optimization.

Quality

Zero-Compromise Standards: Rigorous QC protocols for both in-house and outsourced products, validated by third-party certifications.

Operational Precision: Expertise in lean production management, analytical quality control, and continuous process improvement.

We Look Forward To Working With You.