Specialty Gases
Precision Etching Gas for Advanced Electronics Manufacturing
Nitrogen trifluoride (NF₃) is a stable, non-flammable Specialty Gas engineered for high-performance plasma processes in critical electronics production. NF₃ is used as a chamber cleaning gas in the manufacture of semiconductors, flat panel displays and other electronic devices. As a low-residue fluorine source, it enables ultra-clean manufacturing with reduced environmental impact compared to legacy gases.
YIGAS is a nitrogen trifluoride gas supplier providing 99.99% and 99.996% high-purity NF₃ for semiconductor, flat panel display and thin-film photovoltaic manufacturing. For semiconductor fabs, display manufacturers, photovoltaic equipment users and electronic specialty gas distributors, purchasing NF₃ requires more than comparing purity and price per kilogram. The supplier must also demonstrate stable impurity control, compatible cylinder preparation, batch traceability, reliable recurring supply and practical support for dangerous-goods transportation.
| CAS No. | 7783-54-2 |
| UN No. | 2451 |
| EINECS No. | 232-007-1 |
| Molecular weight | 71.0019 |
| Appearance | Colourless, odourless |
| Melting point | -206.79℃ |
| Boiling point | -129.0℃ |
| Density | 2.96kg/m3 |
| DOT Class | 2.2 & 5.1 |
| Label | Non-flammable Gas, Oxidizing Agent |
| Industrial Grade NF3 | Industrial Grade NF3 | |
| Specification | 99.99% | 99.996% |
| CF4 | ≤40 ppm | ≤20 ppm |
| N2 | ≤10 ppm | ≤5 ppm |
| O2+AR | ≤5 ppm | ≤3 ppm |
| CO | ≤1 ppm | ≤1 ppm |
| CO2 | ≤3 ppm | ≤0.5 ppm |
| N2O | ≤3 ppm | ≤1 ppm |
| SF6 | ≤3 ppm | ≤2 ppm |
| H2O | ≤1 ppm | ≤1 ppm |
| Express as HF | ≤1 ppm | ≤1 ppm |
| Cylinder Option | Valve | NF₃ Net Weight | Typical Use |
| 47L Cylinder | CGA640 | 22 kg | Standard commercial supply |
| 43L DOT Cylinder | CGA640 | 20 kg | DOT cylinder requirement and export projects |
Both configurations are intended for compressed NF₃ gas supply.
Before ordering, the customer should confirm:
Cylinder standard
Cylinder water capacity
Net filling weight
Valve connection
Valve orientation
Gas cabinet compatibility
Regulator compatibility
Customer label requirements
Barcode or serial-number requirements
Pallet configuration
Cylinder ownership
Empty-cylinder return method
The current page should not describe NF₃ as available in a dewar unless a separately engineered cryogenic supply system has been confirmed. Standard commercial supply is normally based on approved compressed-gas cylinders or other specifically qualified pressure containers.
Nitrogen trifluoride is nonflammable but can act as an oxidizing gas and becomes highly reactive under plasma, heat or decomposition conditions.
General precautions include:
Store cylinders in a secure, dry and ventilated location.
Keep cylinders away from heat and direct sunlight.
Separate NF₃ from flammable gases and incompatible materials.
Secure cylinders vertically.
Use CGA640-compatible equipment where applicable.
Use regulators, valves and piping approved for NF₃ service.
Keep oil, grease and combustible contaminants away from gas connections.
Prevent moisture from entering the gas delivery system.
Leak-test the connection before introducing gas.
Use suitable gas cabinets and ventilation.
Install gas monitoring where required by the risk assessment.
Purge process lines according to the approved operating procedure.
Maintain suitable exhaust and abatement systems.
Follow the current SDS and local safety regulations.
Train personnel in oxidizing-gas and emergency-response procedures.
Under high-energy or decomposition conditions, NF₃ can form hazardous fluorine-containing species. Emergency planning must account for the product itself and potential decomposition byproducts.
YIGAS offers both 99.99% and 99.996% nitrogen trifluoride, allowing customers to select a specification based on process sensitivity and impurity requirements.
The published specification includes CF₄, N₂, O₂ + Ar, CO, CO₂, N₂O, SF₆, H₂O and acidity expressed as HF.
This provides more useful purchasing information than a headline purity value alone.
NF₃ is available in:
47L cylinders with 22 kg net filling weight
43L DOT cylinders with 20 kg net filling weight
CGA640 valve connection
YIGAS supplies industrial and specialty gases for semiconductor, electronics, laboratory and advanced manufacturing applications.
Established in 1993, YIGAS has more than 30 years of gas-industry experience and operates multiple production bases supporting industrial and specialty gas supply.
YIGAS continues to invest in high-purity electronic gas production, purification, packaging and supporting infrastructure.
Multi-cylinder shipments, forecast-based deliveries and annual supply requirements can be evaluated for semiconductor, display and photovoltaic customers.
Production, filling, analysis and shipment information can be managed according to the agreed quality and documentation requirements.
YIGAS reviews cylinder standards, dangerous-goods documents, packaging and transportation routes for international projects.
In industries where even microscopic contamination can affect millions of dollars in output, your gas supplier matters.
With YIGAS, you gain a trusted NF₃ gas supplier that delivers:
High purity
Stable supply
Global logistics support
Whether you need electronic-grade NF₃ or bulk supply solutions, we are ready to support your operations with precision and reliability.
Contact YIGAS today to request a quote, discuss your technical requirements, and secure a dependable Nitrogen Trifluoride gas supply partner.
The electronics industry requires ultra-high purity gases and specialty gases for use in semiconductors, flat panel displays, and photovoltaics. YIGAS provides nitrogen, argon, helium, sulfur hexafluoride, and nitrogen trifluoride to meet customers' stringent requirements in cleaning, etching, atmosphere protection, and testing.
Decomposition Hazard: Forms HF above 250°C (OSHA PEL: 10 ppm TWA).
Available in cylinder, dewar
Traceable SDS and DOT/IMDG-certified transport solutions.
Q1. What is nitrogen trifluoride used for?
Q2. Do you supply high-purity NF₃ for electronics?
Q3. How is NF₃ gas packaged?
Q4. Is nitrogen trifluoride toxic or flammable?
Q5. What is the global price of NF₃ gas per kg or per cylinder?
Q6. What are the storage requirements for NF₃ cylinders?
Q7. What are the environmental concerns of NF₃?
Q8. What certifications do your NF₃ products comply with?
Team
Global Leadership: Management team with multinational and listed company backgrounds, backed by decades of expertise in the industrial gases sector.
End-to-End Expertise: Integrated capabilities spanning production, operation, R&D, commercialization, and quality assurance in gas industry.
Technical Excellence: Advanced knowledge in gas/chemical synthesis, purification, and process optimization, supported by on-demand technical application services.
R & D
Innovation-Driven: Focus on cutting-edge R&D to deliver safer, sustainable, and cost-effective gas solutions.
Full-Cycle Development: From concept design to scalable production, ensuring seamless technology transfer and market readiness.
Service
Customer-Centric Solutions: Tailored services with flexibility, professionalism, and 24/7 dedicated support.
Value Proposition: Guaranteed supply chain stability, safety compliance (ISO/OSHA standards), and total cost optimization.
Quality
Zero-Compromise Standards: Rigorous QC protocols for both in-house and outsourced products, validated by third-party certifications.
Operational Precision: Expertise in lean production management, analytical quality control, and continuous process improvement.
Industrial & Specialty Gases
Stable Supply Chain: Our helium sources originate from Qatar and the United States, ensuring reliable supply.
Helium as Core Business: With significant investments, our Zhongshan-based factory spans 13,000 m² and boasts an annual liquid helium production capacity of 300 tons.
China’s Most Advanced Facilities:
Equipped with the nation's most advanced liquid helium and helium filling production lines.
Certified under the ISO 9001:2008 Quality Management System.
Utilizes internationally recognized "filling island-style" production lines.
Gaseous helium from a reliable gases supply is ideal for semiconductor lithography, fiber-drawing, leak detection, carrier gas in GC, and balloon inflation. Liquid helium, sourced from a dedicated gases supply chain, is dedicated to MRI magnet cryo-cooling, superconducting magnet maintenance, and low-temperature physics research.
Ethylene, a colorless, slightly sweet-smelling hydrocarbon (C₂H₄), is the backbone of modern petrochemical industries. As the simplest alkene with a reactive carbon-carbon double bond, it exhibits high flammability (explosive range: 2.7–36% in air) and serves as a critical building block for synthetic chemistry. Used as feedstock for LLDPE/HDPE, epoxy ethane and ethanol production. Compatible with swing-reactor and high-pressure tubular processes. Our ethylene is supplied in high-purity grades (≥99.9% polymer-grade, ≥99.5% chemical-grade) via ISO-certified cylinders, backed by a reliable gases supply network to ensure consistent delivery to your operations.
Propane, a colorless, odorless, and highly flammable alkane (C₃H₈), is a cornerstone of liquefied petroleum gas (LPG) with a boiling point of -42°C, enabling efficient storage and transport as a liquid under moderate pressure. Propane is renowned for its high calorific value (50.33 MJ/kg) and clean combustion properties, making it an ideal choice for high-temperature brazing, metal cutting, forklift fuel, and LPG blending. Supplied in ISO-certified cylinders or bulk tanks through our dependable gases supply network.
Sulfur dioxide (SO₂), a colorless gas with a pungent odor and high water solubility, is a versatile inorganic compound widely used in chemical manufacturing, pulp and paper processing, and as a food desiccant and preservative. It is also commonly used in sulfuric acid production and in the desulfurization of natural gas and oil. With a boiling point of -10°C, it serves as both a reactive intermediate and a functional additive, though its environmental impact as a primary air pollutant requires stringent handling. Our SO₂ is supplied in ISO-certified cylinders.
Ethylene oxide (C₂H₄O), a colorless, flammable gas with a faintly sweet odor, is a highly reactive epoxide critical to modern industrial and medical applications. It is primarily used for the cryogenic sterilization of disposable syringes, endoscopes, and pacemakers. With a boiling point of 10.4°C, it transitions to a liquid below this temperature, exhibiting excellent miscibility with water, ethanol, and ether. Its explosive range (3–100% in air) and carcinogenicity (Class 1B per IARC) necessitate stringent handling under NFPA 704 protocols (Health 4, Flammability 3). Supplied in ISO-certified cylinders or nitrogen-diluted blends.
Methane (CH₄), a type of Industrial Gas, is a colorless, odorless, and non-toxic organic compound with distinct physical characteristics. Under standard temperature and pressure (STP), methane exists as a gas with a density approximately 0.55 times that of air, making it lighter and minimally soluble in water. It transitions to liquid at -161.5°C (boiling point) and solidifies at -182.5°C (melting point), remaining gaseous under ambient conditions. Methane is commonly used as a fuel for heating, cooking, and power generation. Because it is an odorless hydrocarbon gas, it is often mixed with substances that have an odor to report leaks or spills in pipes and systems.
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